Silicon etch with chromium ions generated by a filtered or non-filtered cathodic arc discharge
نویسندگان
چکیده
منابع مشابه
Silicon etch with chromium ions generated by a filtered or non-filtered cathodic arc discharge
The pre-treatment of substrate surfaces prior to deposition is important for the adhesion of physical vapour deposition coatings. This work investigates Si surfaces after the bombardment by energetic Cr ions which are created in cathodic arc discharges. The effect of the pre-treatment is analysed by X-ray diffraction, Rutherford backscattering spectroscopy, scanning electron microscopy and in-d...
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ژورنال
عنوان ژورنال: Science and Technology of Advanced Materials
سال: 2016
ISSN: 1468-6996,1878-5514
DOI: 10.1080/14686996.2016.1140308